Saturday, May 8, 2010

NPGS Dose Matrix Calculator

For the folks using Nabity's NPGS and building dose matrices for ebeam lithography, they know that some calculations are needed to figure out the real dose value of each element in the matrix.

I am sharing a small script which will simplify this process of doing these redundant calculations and which will allow users to focus more on the task at hand (i.e. the lithography process!).

Before running the executable file, the text file *array_calc.txt* has to be modified. rows,cols,start(%),end(%),start_dose need to be altered while preserving the "::" spacers.

The output file of the script will yield the dose allocated to different elements of the dose matrix and will reveal the dose variation. This script saved me a lot of time.

Hope you enjoy it!

[dose_matrix_dist_20100508.tar.gz]

3 comments:

  1. umm is this file a compression of a compression? I tried un-compressing the gz file to only have a single file again. not an executable and a text file. cheers for any input. i look forward to seeing what this does and how it works.

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  2. Dear Sparrow's tail,

    The file is a compressed tar file.

    .tar is an uncompressed file format
    http://en.wikipedia.org/wiki/Tar_(file_format)

    Please use Winrar or Tugzip (on Windows)to extract the contents of the file.

    Hope that helps!

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  3. Hi Dider-

    For some reason I just spotted this reply. Thanks for the help I will look more into it tomorrow.

    cheers

    j

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