To produce high-quality microstructures in photolithography, we often buy expensive (3 inch mask for 675 USD) chromium masks on quartz / soda lime glass. In academic research, it may happen that we are not really sure if something would work out and might not want to spend that kind of money for a mask in the first place.
I often come across grad students who purchased expensive masks to find out that their final device do not work as expected. It turns out that many people are not aware that we can make or buy cheap masks.
A fast turnaround alternative to chromium masks are mylar transparency masks. First draw your design in a CAD program and then simply print it to scale on a transparency with a high resolution printer. Bear in mind that the dark field will block the light, so watch out for the polarity!
Alternatively, if you don't have a good printer, you can place an order for a transparency mask from the following vendors for ~30 USD or so:
1. Advance reproduction
2. Artnet Pro
3. CAD/Art Services, Inc
4. Infinite Graphics (boasts 50,000 DPI printing!)
Subscribe to:
Post Comments (Atom)
Thanks, do you have any experience with either of the four companies mentioned?
ReplyDeleteWhat kind of feature sizes have you been able to achieve with this technique?
ReplyDelete